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Digital Library of the
European Council for Modelling and Simulation |
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Title: |
Buffer Management For Automated Material Handling Systems In
Semiconductor Industries |
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Authors: |
Christian Fischmann,
Fabian Böttinger, Roland Wertz, Christian Kunz |
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Published in:
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ECMS
2008 Proceedings Edited
by: Loucas S. Louca, Yiorgos Chrysanthou, Zuzana Oplatkova, Khalid Al-Begain ISBN:
978-0-9553018-6-5 Doi: 10.7148/2008 22nd
European Conference on Modelling and Simulation, Nicosia, June
3-6, 2008 |
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Citation
format: |
Fischmann,
C., Böttinger, F., Wertz, R., & Kunz, C.
(2008). Buffer
Management For Automated Material Handling Systems In Semiconductor
Industries. ECMS 2008 Proceedings edited by: L. S. Louca,
Y. Chrysanthou, Z. Oplatkova,
K. Al-Begain (pp.
423-427). European Council for Modeling and Simulation. doi:10.7148/2008-0423 |
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DOI: |
http://dx.doi.org/10.7148/2008-0423 |
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Abstract: |
The
automated material handling system (AMHS) is a highly automated transport
solution of actual 300mm semiconductor waferfabs.
The big logistic challenge in such a running system is the just-in-time
delivery of lots (carriers). Therefore, beside tracks and vehicles, there are
different storages (stocker) and buffers (under track storages and load
ports) integrated in such a transport system. To conquer the logistic
challenge, an optimum allocation and control strategy for all storage
equipment is required. This paper describes the investigation of different
storage and buffer strategies based on detailed simulation models of a
dedicated semiconductor factory area. |
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