Digital Library

of the European Council for Modelling and Simulation



Buffer Management For Automated Material Handling Systems In Semiconductor Industries


Christian Fischmann, Fabian Böttinger, Roland Wertz, Christian Kunz

Published in:


ECMS 2008 Proceedings

Edited by: Loucas S. Louca, Yiorgos Chrysanthou, Zuzana Oplatkova, Khalid Al-Begain


ISBN: 978-0-9553018-6-5

Doi: 10.7148/2008


22nd European Conference on Modelling and Simulation,

Nicosia, June 3-6, 2008


Citation format:

Fischmann, C., Böttinger, F., Wertz, R., & Kunz, C. (2008). Buffer Management For Automated Material Handling Systems In Semiconductor Industries. ECMS 2008 Proceedings edited by: L. S. Louca, Y. Chrysanthou, Z. Oplatkova, K. Al-Begain (pp. 423-427). European Council for Modeling and Simulation. doi:10.7148/2008-0423



The automated material handling system (AMHS) is a highly automated transport solution of actual 300mm semiconductor waferfabs. The big logistic challenge in such a running system is the just-in-time delivery of lots (carriers). Therefore, beside tracks and vehicles, there are different storages (stocker) and buffers (under track storages and load ports) integrated in such a transport system. To conquer the logistic challenge, an optimum allocation and control strategy for all storage equipment is required. This paper describes the investigation of different storage and buffer strategies based on detailed simulation models of a dedicated semiconductor factory area.

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